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The influence of thermal treatments under hydrostatic pressure prior to irradiation on the annealing characteristics of the VO defect in Si

✍ Scribed by C.A. Londos; G.D. Antonaras; M.S. Potsidi; A. Misiuk


Book ID
108215593
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
677 KB
Volume
159-160
Category
Article
ISSN
0921-5107

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The effect of neutron irradiation on oxy
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## Abstract Silicon is the dominant material in electronic industry. Its use for various applications requires processing stages, important among them those involving thermal treatments. Such treatments in Si trigger the mechanisms of oxygen aggregation resulting in the formation of oxygen precipit