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The influence of the cross section of the electron-copper atom collision on the electrical conductivity of Ar-Cu and SF 6 -Cu plasmas

✍ Scribed by Chervy, B; Dupont, O; Gleizes, A; Krenek, P

Book ID: 120580419
Publisher: Institute of Physics
Year: 1995
Tongue: English
Weight: 462 KB
Volume: 28
Category: Article
ISSN: 0022-3727
DOI: 10.1088/0022-3727/28/10/010

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