The influence of substrate temperature on femtosecond laser micro-processing of silicon, stainless steel and glass
β Scribed by J.S. Yahng; J.R. Nam; S.C. Jeoung
- Publisher
- Elsevier Science
- Year
- 2009
- Tongue
- English
- Weight
- 426 KB
- Volume
- 47
- Category
- Article
- ISSN
- 0143-8166
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