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The influence of substrate material and annealing procedure on the properties of superconducting thin films

✍ Scribed by T. S. Baller; G. N. A. Veen; H. A. M. Hal

Publisher
Springer
Year
1988
Tongue
English
Weight
617 KB
Volume
46
Category
Article
ISSN
1432-0630

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TiO 2 thin films were deposited on unheated and heated glass substrates at an elevated sputtering pressure of 3 Pa by radio frequency (RF) reactive magnetron sputtering. TiO 2 films deposited at room temperature were annealed in air for 1 h at various temperatures ranging from 300 to 600 Β°C. The str