✦ LIBER ✦
The influence of rapid thermal processing on the properties of MoSi2 layers formed by using the ion implantation through metal technique
✍ Scribed by Th Gessner; R Reich; W Unger; W Wolke
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 333 KB
- Volume
- 177
- Category
- Article
- ISSN
- 0040-6090
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