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The influence of radiation damage on the sputtering yield of silicon

✍ Scribed by J. Sielanko; M. Sowa

Publisher: Elsevier Science
Year: 1983
Weight: 277 KB
Volume: 209-210
Category: Article
ISSN: 0167-5087
DOI: 10.1016/0167-5087(83)90842-6

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