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The influence of photodissociated N2O in pulsed-laser deposition of Y-Ba-Cu-O films

✍ Scribed by P. Schwab; A. Kochemasov; R. Kullmer; D. Bäuerle


Book ID
104721998
Publisher
Springer
Year
1992
Tongue
English
Weight
359 KB
Volume
54
Category
Article
ISSN
1432-0630

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Pulsed-laser deposition of Y-Ba-Cu-O in
✍ P. Schwab; D. Bäuerle 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 141 KB

Y-Ba-Cu-O films were produced by reactive sputtering in 02 and N20 atmospheres using 248 nm KrF-laser radiation. For substrate temperatures Ts < 630 °C the superconducting properties of films fabricated in N20 are superior to those deposited in 02.