The influence of hard-baking temperature applied for SU8 sensor layer on the sensitivity of capacitive chemical sensor

✍ Scribed by Marta Klanjšek Gunde; Nina Hauptman; Marijan Maček; Matjaž Kunaver

• Publisher: Springer
• Year: 2008
• Tongue: English
• Weight: 441 KB
• Volume: 95
• Category: Article
• ISSN: 1432-0630
• DOI: 10.1007/s00339-008-4966-4