The influence of electron beam energy on defect density in MOS device quality oxides : A. Balasinski, A. Jakubowski and A. Swit. Vacuum 38(11), 1041 (1988)

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 142 KB
• Volume: 30
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(90)90044-n