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The influence of different doping elements on microstructure, piezoelectric coefficient and resistivity of sputtered ZnO film

โœ Scribed by X.B. Wang; C. Song; D.M. Li; K.W. Geng; F. Zeng; F. Pan

Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
373 KB
Volume
253
Category
Article
ISSN
0169-4332

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Effect of magnesium doping on the struct
Effect of magnesium doping on the structural and piezoelectric properties of sputtered ZnO thin film
โœ Walter Water; Yin-Shiang Yan; Teen-Hang Meen ๐Ÿ“‚ Article ๐Ÿ“… 2008 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 504 KB

Structural and piezoelectric characteristics of magnesium-doped ZnO films were investigated. Magnesium-doped ZnO films with a c-axis preferred orientation were deposited on ST-cut quartz by radio frequency magnetron sputtering. The crystalline structure and surface morphology of films were studied b