✦ LIBER ✦
The influence of Cl2 on Si1 - xGex selective epitaxial growth and B-doping properties by UHV-CVD
✍ Scribed by Ken-ichi Aketagawa; Toru Tatsumi; Junro Sakai
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 402 KB
- Volume
- 127
- Category
- Article
- ISSN
- 0022-0248
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