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The Influence of Carbon Precursors on the Gas-Phase Chemistry of Titanium Carbide CVD

✍ Scribed by S. de Persis; F. Teyssandier; A. McDaniel; M. D. Allendorf

Publisher: John Wiley and Sons
Year: 2002
Tongue: English
Weight: 627 KB
Volume: 8
Category: Article
ISSN: 0948-1907
DOI: 10.1002/1521-3862(20020304)8:2<63::aid-cvde63>3.0.co;2-j

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