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The Influence of AsCl3 Impurity on Growth Mechanism and Structure Perfection of Autoepitaxial Germanium Films

✍ Scribed by A. N. Stepanova; Prof. N. N. Sheftal

Publisher: John Wiley and Sons
Year: 1972
Tongue: English
Weight: 519 KB
Volume: 7
Category: Article
ISSN: 0232-1300
DOI: 10.1002/crat.19720070115

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✦ Synopsis

The changes of film morphology and microtwin concentration in these films caused by AsC1, impurity have been studied. The correlation of growth mechanism and structure perfection of the films has been revealed.

Es werden die durch Verunreinigungen von AsCI, verursachten VerBnderungen der Filmmorphologie und der Haufigkeit der Mikrozwillinge in diesen Filmen untersucht und die Beziehungen zwischen Wachstumsmechanismus und Strukturperfekt,ion der Filme aufgezeigt.

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