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The influence of annealing on mechanical properties of hydrogenated nanocrystalline silicon thin films

✍ Scribed by Peng, H Y; Wang, J L; Wang, L; Zhou, B


Book ID
120654010
Publisher
Institute of Physics
Year
2009
Tongue
English
Weight
701 KB
Volume
152
Category
Article
ISSN
1742-6588

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