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The inductive channel effect on the parameters of the space-charge electrode sheaths in a hybrid RF discharge

✍ Scribed by A. F. Alexandrov; K. V. Vavilin; E. A. Kralkina; V. B. Pavlov; V. P. Savinov; V. G. Yakunin


Book ID
111495412
Publisher
Allerton Press, Inc.
Year
2010
Tongue
English
Weight
149 KB
Volume
65
Category
Article
ISSN
0027-1349

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