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The indentation hardness of silicon measured by instrumented indentation: What does it mean?

✍ Scribed by Haberl, Bianca; Bayu Aji, Leonardus Bimo; Williams, J.S.; Bradby, Jodie E.

Book ID
120070635
Publisher
Cambridge University Press
Year
2012
Tongue
English
Weight
207 KB
Volume
27
Category
Article
ISSN
0884-2914

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## Abstract The aim of this work was to investigate the mechanical properties of the titanium anodic films (TiO~2~) produced by anodic oxidation under galvanostatic conditions, using a 1.4__M__ phosphoric acid electrolyte, with different current densities (__J__) on commercially pure titanium (cp‐T