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The improvement of electrical properties of Pd-based contact to p-GaN by surface treatment

✍ Scribed by Dae-Woo Kim; Jun Cheol Bae; Woo Jin Kim; Hong Koo Baik; Jae-Min Myoung; Sung-Man Lee


Book ID
107452592
Publisher
Springer US
Year
2001
Tongue
English
Weight
159 KB
Volume
30
Category
Article
ISSN
0361-5235

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The electrical and optical characteristics of Zn + ion-implanted Ni/Au ohmic contacts to p-GaN were investigated. After the preparation of Ni/Au electrode on the surface of p-GaN, the metal/p-GaN contact interface was doped by 35 keV Zn + implantation with fluences of 5 Γ‚ 10 15 -5 Γ‚ 10 16 cm Γ€2 . Su