The hydrogen effusion induced structural changes and defects in hydrogenated amorphous SiGe films: dependence upon the microstructure

✍ Scribed by Petr Sládek; Pavel St'ahel; Marie-Luce Thèye; Pere Roca i Cabarrocas

• Book ID: 117148904
• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 115 KB
• Volume: 227-230
• Category: Article
• ISSN: 0022-3093
• DOI: 10.1016/s0022-3093(98)00186-0