𝔖 Bobbio Scriptorium
✦   LIBER   ✦

The high-power pulsed magnetron: a review of early developments

✍ Scribed by Megaw, E.C.S.


Book ID
119741134
Publisher
Institution of Electrical Engineers
Year
1946
Weight
498 KB
Volume
93
Category
Article
ISSN
2050-5485

No coin nor oath required. For personal study only.


📜 SIMILAR VOLUMES


A novel pulsing method for the enhanceme
✍ Jung-Hwan In; Sang-Hun Seo; Hong-Young Chang 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 513 KB

A novel pulsing technique has been proposed to enhance the deposition rate of film in high power pulsed magnetron sputtering (HPPMS). The detailed investigations on the temporal behavior of the plasma density have been done. The results have provided a clue to it: a temporal discrepancy between the