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The hardness of amorphous Si-DLC films by molecular dynamics simulations

✍ Scribed by Huiqing Lan 兰

Book ID
126362362
Publisher
Wuhan University of Technology
Year
2013
Tongue
English
Weight
361 KB
Volume
28
Category
Article
ISSN
1000-2413

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Thermal conductivity (TC) of thin films will be influenced by boundary if the thickness is close to the mean free path (MFP). In this paper, we calculate the TC of crystalline and amorphous SiO 2 thin films, which are commonly used materials in micro devices and Integrated Circuits, by nonequilibriu