The gaseous anodization of silicon and its applications : W. Eccleston, K. J. Barlow and A. Kiermasz. Vacuum35 (10–11), 455 (1985)

• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 128 KB
• Volume: 27
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(87)90715-3