300 mm Conversion challenge and breakthr
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P. Kuecher; D. Tuft; K. Roithner; M. Hiatt
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Article
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1999
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Elsevier Science
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English
โ 22 KB
The status regarding the planned conversion of the semiconductor industry to the larger and more productive 300 mm wafer size is reviewed. Many efforts are already underway to aid the conversion to 300 mm wafers. In addition to the consortiums in both U.S. and Japan, targeted at working with the equ