Chemistry and kinetics of chemical vapou
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W. Benzinger; A. Becker; K.J. HΓΌttinger
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Article
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1996
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Elsevier Science
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English
β 949 KB
Open scientific problems of chemical vapour deposition of pyrocarbon are discussed on the basis of brief historical and literature reviews. Some thermodynamic considerations are followed by detailed analyses of reaction pathways in hydrocarbon pyrolysis. Reaction schemes are derived, and correspondi