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The formation of titanium, chromium, niobium and zirconium aluminides in thin films for interconnections

✍ Scribed by R.K Ball; A.G Todd

Publisher: Elsevier Science
Year: 1987
Tongue: English
Weight: 720 KB
Volume: 149
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(87)90390-7

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