✦ LIBER ✦
The formation of Ti(OCN) layers produced from metal—organic compounds using plasma-assisted chemical vapour deposition
✍ Scribed by T. Wierzchoń; J.R. Sobiecki; D. Krupa
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 399 KB
- Volume
- 59
- Category
- Article
- ISSN
- 0257-8972
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