✦ LIBER ✦
The formation of nano-size SiO2thin film on an aluminum plate with hexamethyldisilazane (HMDSA) and hexamethyldisiloxane (HMDSO)
✍ Scribed by H. K. Ma; E. Zhao; C. L. Yeh; K. M. Chung
- Book ID
- 107432587
- Publisher
- Springer-Verlag
- Year
- 2003
- Tongue
- English
- Weight
- 669 KB
- Volume
- 12
- Category
- Article
- ISSN
- 1003-2169
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