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The formation of hydrogen passivated silicon single-crystal surfaces using ultraviolet cleaning and HF etching
✍ Scribed by Takahagi, T.; Nagai, I.; Ishitani, A.; Kuroda, H.; Nagasawa, Y.
- Book ID
- 120229673
- Publisher
- American Institute of Physics
- Year
- 1988
- Tongue
- English
- Weight
- 933 KB
- Volume
- 64
- Category
- Article
- ISSN
- 0021-8979
- DOI
- 10.1063/1.341489
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