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The formation of dislocations and their in-situ detection during silicon vapour phase epitaxy at reduced temperature

✍ Scribed by A.J. Pidduck; D.J. Robbins; I.M. Young; A.G. Cullis; A.S.R. Martin


Book ID
103952737
Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
640 KB
Volume
4
Category
Article
ISSN
0921-5107

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