The formation of buried oxide layers by ion implantation : T. A. Woods, E. Antonelli, R. A. Collins, D. J. Chivers and G. Dearnaley. Vacuum36(11/12), 883 (1986)

• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 129 KB
• Volume: 27
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(87)90168-5