The formation of a high-resistivity layer close to the surface in Si irradiated with electrons at higher temperatures

✍ Scribed by Gerasimenko, N. N. ;Kibalina, N. P. ;Stas, V. F.

• Publisher: John Wiley and Sons
• Year: 1980
• Tongue: English
• Weight: 200 KB
• Volume: 59
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/pssa.2210590168