✦ LIBER ✦
The formation of a continuous amorphous layer by room-temperature implantation of boron into silicon: K S Jones et al, J appl Phys, 63, 1988, 1414–1418
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 152 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0042-207X
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