𝔖 Bobbio Scriptorium
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The focussing of membrane R&D on areas of commercial potential

✍ Scribed by Riedinger, Horst; Faul, Wolfgang


Book ID
122824967
Publisher
Elsevier Science
Year
1988
Tongue
English
Weight
1016 KB
Volume
36
Category
Article
ISSN
0376-7388

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Hydrogen is being used in many semiconductor manufacturing steps as a reactant or as a carrier gas. Examples of these process steps are silicon epitaxy, doping of boron, and Ε½ . chemical vapor deposition CVD of tungsten metal. In many Ε½ . of these processes, ultrahigh-purity UHP hydrogen is required