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The fixed-polarizer nulling scheme in generalized ellipsometry

โœ Scribed by R.M.A. Azzam; T.L. Bundy; N.M. Bashara


Publisher
Elsevier Science
Year
1973
Tongue
English
Weight
487 KB
Volume
7
Category
Article
ISSN
0030-4018

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A procedure for the determination of the interface layer thickness between the bulk รlm and the Si substrate SiO 2 from single-wavelength null ellipsometric data is described. The e โ€ ect of the angular errors in the angle of incidence is eliminated because it is found along with the รlm and interfac