THE FEASIBILITY OF ACHIEVING 15-NM RESOLUTION WITH A SCANNING MICROPROBE USING A LIQUID GALLIUM ION SOURCE

✍ Scribed by V. E. Krohn; G. R. Ringo

• Book ID: 114883540
• Publisher: John Wiley and Sons
• Year: 1978
• Tongue: English
• Weight: 181 KB
• Volume: 306
• Category: Article
• ISSN: 0890-6564
• DOI: 10.1111/j.1749-6632.1978.tb25649.x