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The fate of the (reactive) primary ion: Sputtering and desorption

✍ Scribed by W. Vandervorst; T. Janssens; C. Huyghebaert; B. Berghmans


Book ID
103819434
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
608 KB
Volume
255
Category
Article
ISSN
0169-4332

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