The fabrication of polysilicon thin film transistors by copper-induced lateral crystallization

✍ Scribed by Wei-Chieh Hsueh; Si-Chen Lee

• Book ID: 114617036
• Publisher: IEEE
• Year: 2003
• Tongue: English
• Weight: 890 KB
• Volume: 50
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/ted.2003.811397