The Fabrication of Diamond Microshells
β Scribed by P. John; J.-K. Lee; M. Anderson; F. Gray; J. Wilson
- Publisher
- John Wiley and Sons
- Year
- 2006
- Tongue
- English
- Weight
- 362 KB
- Volume
- 12
- Category
- Article
- ISSN
- 0948-1907
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β¦ Synopsis
Miniature hollow diamond shells can be synthesized by conformal diamond coverage using CVD and subsequent etching of the spherical silica matrices. The directional character of DC plasma growth, and the temperature gradient in silica spheres in contact with a cooled substrate, has been exploited to produce shells with a single micrometerβsized aperture. These preliminary results anticipate the use of diamond nanoshells for the controlled release of drugs and novel applications spanning biosensors and medicine.
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Diamond nanorods were fabricated for a sensing device by utilizing reactive ion etching in CF 4 /O 2 radio frequency plasma. The length of the nanorods has been controlled by the ion etching time. The obtained morphologies were investigated by scanning electron microscopy. The gas sensing properties
The combination of photolithography, e-beam lithography and atomic force microscopy (AFM) techniques is used for local oxidation of hydrogen terminated surfaces with a resolution down to % 10 nm. Lithographic masks are used for treatment in oxygen plasma. In AFM the surface can be oxidized directly