✦ LIBER ✦
The electron beam proximity printing lithography, a candidate for the 0.35 and 0.25 micron chip generations
✍ Scribed by U. Behringer; W. Haug; K. Meissner; W. Ziemlich; H. Bohlen; T. Bayer; W. Kulcke; H. Rothuizen; G. Sasso; P. Vettiger
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 489 KB
- Volume
- 13
- Category
- Article
- ISSN
- 0167-9317
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