The effects of the simultaneous addition of diborane and ammonia on the hot-filament-assisted chemical vapor deposition of diamond II. Characterization of diamond and BCN film

✍ Scribed by Xie, Z.Y; Edgar, J.H; McCormick, T.L; Sidorov, M.V

• Book ID: 122964207
• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 572 KB
• Volume: 7
• Category: Article
• ISSN: 0925-9635
• DOI: 10.1016/S0925-9635(98)00207-6