✦ LIBER ✦
The effects of SiCl4 and GeCl4 oxidation, variable properties, buoyancy and tube rotation on the modified chemical vapor deposition process
✍ Scribed by S. Joh; R. Greif
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 846 KB
- Volume
- 38
- Category
- Article
- ISSN
- 0017-9310
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