The effects of sample distance on Al-film structure when using magnetron sputtering ion-plating

✍ Scribed by Lijun Wan; KH Kuo

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 588 KB
• Volume: 40
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(90)90101-4