The effects of RF power on the interfacial property between Al 2 O 3 and Si 3 N 4 and on the memory property in a MANOS structure

✍ Scribed by Kim, Hyungchul; Woo, Sanghyun; Lee, Jaesang; Lee, Hyerin; Jeon, Hyeongtag

• Book ID: 121371567
• Publisher: Institute of Physics
• Year: 2010
• Tongue: English
• Weight: 851 KB
• Volume: 43
• Category: Article
• ISSN: 0022-3727
• DOI: 10.1088/0022-3727/43/50/505301