✦ LIBER ✦
The effects of rapid thermal processing on ultra-shallow junctions for deep sub-micron MOSFETs
✍ Scribed by R Liu; C.-Y Lu; J.J Sung; C.-S Pai; N.-S Tsai
- Book ID
- 103394954
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 455 KB
- Volume
- 38
- Category
- Article
- ISSN
- 0038-1101
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