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The effects of pulling rates on the shape of crystal/melt interface in Si single crystal growth by the Czochralski method

✍ Scribed by Kyung-Woo Yi; Hyung-Tae Chung; Hong-Woo Lee; Jong-Kyu Yoon


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
673 KB
Volume
132
Category
Article
ISSN
0022-0248

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