✦ LIBER ✦
The effects of processing parameters on the microstructure and properties of sputter-deposited TiW thin film diffusion barriers: I M Oparowski et al, Thin Solid Films, 153, 1987, 313–328
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 158 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0042-207X
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