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The effects of nitrogen flow on the Raman spectra of polycrystalline diamond films

โœ Scribed by Qing Zhang; S.F. Yoon; J. Ahn; Rusli; Yong-Ping Guo


Book ID
108361651
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
483 KB
Volume
29
Category
Article
ISSN
0026-2692

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## Abstract About 20 ฮผm thick films were deposited in the same run by MPCVD at 900 ยฐC on Si substrates and then hydrogenated in situ during 30 min with a hydrogen plasma at the same temperature. Their surfaces were kept as prepared or more or less strongly oxidized by annealing at 600 ยฐC under ambi