✦ LIBER ✦
The effects of impurity diffusion and surface damage on oxygen precipitation in silicon: R B Fair, J Appl Phys, 54 (1), 1983, 388–391
- Publisher
- Elsevier Science
- Year
- 1985
- Tongue
- English
- Weight
- 147 KB
- Volume
- 35
- Category
- Article
- ISSN
- 0042-207X
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