The effects of 6 keV Ar+ ion bombardment on the surface composition of simple and complex titanium oxides
β Scribed by OP Ivanova; AV Naumkin; LA Vasilyev
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 572 KB
- Volume
- 46
- Category
- Article
- ISSN
- 0042-207X
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The interaction of 6 keV oxygen ions with InP surfaces was studied as a function of O 2 Y ion incident angle. The bombarded InP surfaces were characterized in situ by x-ray photoelectron spectroscopy (XPS). The XPS measurements suggest that surface oxide layers formed by O 2 Y bombardment comprise a