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The effect that nitrogen ion irradiation and the deposition of a nanosize-thick carbon coating have on microhardness and crack-growth resistance in silicon

✍ Scribed by A. Ya. Kolpakov; O. A. Druchinina; V. A. Kharchenko


Book ID
111473026
Publisher
SP MAIK Nauka/Interperiodica
Year
2009
Tongue
English
Weight
212 KB
Volume
4
Category
Article
ISSN
1995-0780

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