Kinetics of methylchlorosilane formation
โ
J. P. Agarwala; John L. Falconer
๐
Article
๐
1987
๐
John Wiley and Sons
๐
English
โ 687 KB
The kinetics of the direct synthesis reaction (Si + 2CH,CI --f (CH&3iCla) were measured on a Cu,Si alloy containing 1.2 atom % Zn. Reaction was carried out in a differential reactor (520-595 K, 1 atm) attached to an ultrahigh vacuum (UHV) system. Auger spectroscopy was used to characterize the surf